Plasma-Based Multifunctional Surface Modification and Laser Doping Technologies for Bifacial PERL/PERC c-Si Solar Cells with Selective Emitter

Using the so-called PassDop approach, a standard PERC solar cell can be transformed into biPERL+SE with enhanced efficiency and bifaciality. This approach is implemented by adapting industrial PERC processes, along with an extra or a modified laser process step for realizing the locally doped area. For better understanding of the realized structures, the properties of coating layers, local doped areas, and induced recombination due to local laser doping and metallization is investigated in detail as well as adaptation issues between mutually transferred processes.