Sputtering by Particle Bombardment

This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.

InhaltsangabeIntroduction and Overview (R. Behrisch, W. Eckstein).- Computer Simulation of the Sputtering Process (W. Eckstein, H.M. Urbassek).- Sputtering Yields (W. Eckstein).- Results of Molecular Dynamics Calculations (H.M. Urbassek).- Energy and Angular Distributions of Sputtered Species (H. Gnaser).- Chemical Sputtering (W. Jacob, J. Roth).- Electronic Sputtering with Swift Heavy Ions (W. Assmann, M. Toulemonde, C. Trautmann) Subject Index